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Optical Detection of SiN Stress Layer Induced Carrier Mobility Enhancement in Silicon

Wirbeleit, F. and Pedrero, V. and Thron, D. and Stephan, R. and Schwalke, Udo (2008):
Optical Detection of SiN Stress Layer Induced Carrier Mobility Enhancement in Silicon.
In: Material Research Society (MRS), San Francisco, CA, USA, 24.-28.03.2008, [Conference or Workshop Item]

Item Type: Conference or Workshop Item
Erschienen: 2008
Creators: Wirbeleit, F. and Pedrero, V. and Thron, D. and Stephan, R. and Schwalke, Udo
Title: Optical Detection of SiN Stress Layer Induced Carrier Mobility Enhancement in Silicon
Language: English
Divisions: 18 Department of Electrical Engineering and Information Technology
18 Department of Electrical Engineering and Information Technology > Institute for Semiconductor Technology and Nano-Electronics
Event Title: Material Research Society (MRS)
Event Location: San Francisco, CA, USA
Event Dates: 24.-28.03.2008
Date Deposited: 01 Jul 2011 08:24
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