Wirbeleit, F. and Pedrero, V. and Thron, D. and Stephan, R. and Schwalke, Udo (2008):
Optical Detection of SiN Stress Layer Induced Carrier Mobility Enhancement in Silicon.
Material Research Society (MRS), San Francisco, CA, USA, 24.-28.03.2008, [Conference or Workshop Item]
| Item Type: | Conference or Workshop Item |
|---|---|
| Erschienen: | 2008 |
| Creators: | Wirbeleit, F. and Pedrero, V. and Thron, D. and Stephan, R. and Schwalke, Udo |
| Title: | Optical Detection of SiN Stress Layer Induced Carrier Mobility Enhancement in Silicon |
| Language: | English |
| Divisions: | 18 Department of Electrical Engineering and Information Technology 18 Department of Electrical Engineering and Information Technology > Institute for Semiconductor Technology and Nano-Electronics |
| Event Title: | Material Research Society (MRS) |
| Event Location: | San Francisco, CA, USA |
| Event Dates: | 24.-28.03.2008 |
| Date Deposited: | 01 Jul 2011 08:24 |
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| Suche nach Titel in: | TUfind oder in Google |
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