Wirbeleit, F. and Pedrero, V. and Thron, D. and Stephan, R. and Schwalke, Udo (2008):
Optical Detection of SiN Stress Layer Induced Carrier Mobility Enhancement in Silicon.
Material Research Society (MRS), San Francisco, CA, USA, 24.-28.03.2008, [Conference or Workshop Item]
Item Type: | Conference or Workshop Item |
---|---|
Erschienen: | 2008 |
Creators: | Wirbeleit, F. and Pedrero, V. and Thron, D. and Stephan, R. and Schwalke, Udo |
Title: | Optical Detection of SiN Stress Layer Induced Carrier Mobility Enhancement in Silicon |
Language: | English |
Divisions: | 18 Department of Electrical Engineering and Information Technology 18 Department of Electrical Engineering and Information Technology > Institute for Semiconductor Technology and Nano-Electronics |
Event Title: | Material Research Society (MRS) |
Event Location: | San Francisco, CA, USA |
Event Dates: | 24.-28.03.2008 |
Date Deposited: | 01 Jul 2011 08:24 |
Export: | |
Suche nach Titel in: | TUfind oder in Google |
![]() |
Send an inquiry |
Options (only for editors)
![]() |
Show editorial Details |