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CMOS Integration of Epitaxial Gd2O3

Lemme, M. C. and Gottlob, H. D. B. and Echtermeyer, T. and Kurz, H. and Endres, Ralf and Schwalke, Udo and Czernohorsky, M. and Osten, H. J. (2008):
CMOS Integration of Epitaxial Gd2O3.
In: 15th Workshop on Dielectrics in Microelectronics (WoDiM), 23.-25.06.2008, Bad Saarow, Deutschland, [Conference or Workshop Item]

Item Type: Conference or Workshop Item
Erschienen: 2008
Creators: Lemme, M. C. and Gottlob, H. D. B. and Echtermeyer, T. and Kurz, H. and Endres, Ralf and Schwalke, Udo and Czernohorsky, M. and Osten, H. J.
Title: CMOS Integration of Epitaxial Gd2O3
Language: English
Divisions: 18 Department of Electrical Engineering and Information Technology
18 Department of Electrical Engineering and Information Technology > Institute for Semiconductor Technology and Nano-Electronics
Event Title: 15th Workshop on Dielectrics in Microelectronics (WoDiM)
Event Location: 23.-25.06.2008
Event Dates: Bad Saarow, Deutschland
Date Deposited: 29 Jun 2011 10:32
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