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Complementary Metal Oxide Semiconductor Integration of Epitaxial Gd2O3

Lemme, M. C. and Gottlob, H. D. B. and Echtermeyer, T. and Kurz, H. and Endres, Ralf and Schwalke, Udo and Czernohorsky, M. and Osten, H. J. (2009):
Complementary Metal Oxide Semiconductor Integration of Epitaxial Gd2O3.
In: Journal of Vacuum Science & Technology B, pp. 258-261, 27, (1), [Online-Edition: http://dx.doi.org/10.1116/1.3054350],
[Article]

Item Type: Article
Erschienen: 2009
Creators: Lemme, M. C. and Gottlob, H. D. B. and Echtermeyer, T. and Kurz, H. and Endres, Ralf and Schwalke, Udo and Czernohorsky, M. and Osten, H. J.
Title: Complementary Metal Oxide Semiconductor Integration of Epitaxial Gd2O3
Language: English
Journal or Publication Title: Journal of Vacuum Science & Technology B
Volume: 27
Number: 1
Divisions: 18 Department of Electrical Engineering and Information Technology
18 Department of Electrical Engineering and Information Technology > Institute for Semiconductor Technology and Nano-Electronics
Date Deposited: 29 Jun 2011 09:42
Official URL: http://dx.doi.org/10.1116/1.3054350
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