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Nanoscale Electrical Characterization at the Wafer Level: Defects in High-k Dielectrics

Schwalke, Udo (2010):
Nanoscale Electrical Characterization at the Wafer Level: Defects in High-k Dielectrics.
In: VDE-Fachgruppentagung 8.5.6 - fWLR / Wafer Level Reliability, Erfurt, Deutschland, 17.-18.05.2010, [Conference or Workshop Item]

Item Type: Conference or Workshop Item
Erschienen: 2010
Creators: Schwalke, Udo
Title: Nanoscale Electrical Characterization at the Wafer Level: Defects in High-k Dielectrics
Language: English
Divisions: 18 Department of Electrical Engineering and Information Technology
18 Department of Electrical Engineering and Information Technology > Institute for Semiconductor Technology and Nano-Electronics
Event Title: VDE-Fachgruppentagung 8.5.6 - fWLR / Wafer Level Reliability
Event Location: Erfurt, Deutschland
Event Dates: 17.-18.05.2010
Date Deposited: 28 Jun 2011 10:15
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