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CAD for MEMS: from the idea to the reality

Hofmann, Klaus ; Poppe, ; Rencz, ; Glesner, ; Szekely, ; Karam, ; Courtois, ; Poppe, ; Rencz, ; Glesner, ; Szekely, ; Karam, ; Courtois, (1996):
CAD for MEMS: from the idea to the reality.
In: Mecatronics: 3rd France-Japan Congress, Besancon, France 1996; Proceedings, [Conference or Workshop Item]

Item Type: Conference or Workshop Item
Erschienen: 1996
Creators: Hofmann, Klaus ; Poppe, ; Rencz, ; Glesner, ; Szekely, ; Karam, ; Courtois, ; Poppe, ; Rencz, ; Glesner, ; Szekely, ; Karam, ; Courtois,
Title: CAD for MEMS: from the idea to the reality
Language: English
Series Name: Mecatronics: 3rd France-Japan Congress, Besancon, France 1996; Proceedings
Divisions: 18 Department of Electrical Engineering and Information Technology
Date Deposited: 19 Nov 2008 16:00
License: [undefiniert]
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