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Chemical composition, crystallographic structure and impedance spectroscopy of titanium oxynitride TiNxOy thin films

Radecka, M. and Pamula, E. and Trenczek-Zajac, A. and Zakrzewska, K. and Brudnik, A. and Kusior, E. and Kim-Ngan, N.-T. H. and Balogh, A. G. :
Chemical composition, crystallographic structure and impedance spectroscopy of titanium oxynitride TiNxOy thin films.
[Online-Edition: http://www.sciencedirect.com/science/article/pii/S0167273810...]
In: Solid State Ionics, 192 (1) pp. 693-698.
[Article] , (2011)

Official URL: http://www.sciencedirect.com/science/article/pii/S0167273810...

Abstract

Titanium oxynitride TiNxOy thin films have been deposited by DC-pulsed magnetron sputtering from Ti target in the Ar + N2 + O2 reactive atmosphere controlled by plasma emission spectroscopy. Correlation between chemical composition and crystallographic structure of thin films has been determined and presented in the form of the pseudo-equilibrium ternary phase diagram. The atomic N/Ti and O/Ti ratios have been derived from Rutherford backscattering (RBS) measurements. X-ray diffraction at grazing incidence has revealed formation of defective TiN-TiO solid solutions. The surface roughness estimated from atomic force microscopy (AFM) surface images decreases with increasing oxygen content in the films, in accordance with the progressive sample amorphisation. Impedance spectroscopy measurements indicate that the electrical conductivity changes its character from metallic to semiconducting with increasing oxygen content in TiNxOy thin films.

Item Type: Article
Erschienen: 2011
Creators: Radecka, M. and Pamula, E. and Trenczek-Zajac, A. and Zakrzewska, K. and Brudnik, A. and Kusior, E. and Kim-Ngan, N.-T. H. and Balogh, A. G.
Title: Chemical composition, crystallographic structure and impedance spectroscopy of titanium oxynitride TiNxOy thin films
Language: English
Abstract:

Titanium oxynitride TiNxOy thin films have been deposited by DC-pulsed magnetron sputtering from Ti target in the Ar + N2 + O2 reactive atmosphere controlled by plasma emission spectroscopy. Correlation between chemical composition and crystallographic structure of thin films has been determined and presented in the form of the pseudo-equilibrium ternary phase diagram. The atomic N/Ti and O/Ti ratios have been derived from Rutherford backscattering (RBS) measurements. X-ray diffraction at grazing incidence has revealed formation of defective TiN-TiO solid solutions. The surface roughness estimated from atomic force microscopy (AFM) surface images decreases with increasing oxygen content in the films, in accordance with the progressive sample amorphisation. Impedance spectroscopy measurements indicate that the electrical conductivity changes its character from metallic to semiconducting with increasing oxygen content in TiNxOy thin films.

Journal or Publication Title: Solid State Ionics
Volume: 192
Number: 1
Publisher: Elsevier Science Publishing Company
Uncontrolled Keywords: Impedance spectroscopy, Rutherford backscattering, Thin films, Titanium oxynitrides
Divisions: 11 Department of Materials and Earth Sciences > Material Science > Material Analytics
11 Department of Materials and Earth Sciences > Material Science
11 Department of Materials and Earth Sciences
Date Deposited: 15 Jun 2011 14:52
Official URL: http://www.sciencedirect.com/science/article/pii/S0167273810...
Additional Information:

Proceedings of the 17th International Conference on Solid State Ionics

Funders: The financial support of the Polish Ministry of Education and Science (2009-2012) within the project NN515 080 637 is highly acknowledged., Ion Beam Analysis were performed within the scope of DAAD project D/08/07729 between Poland and Germany and MNiSW project No. 651/N-DAAD/2010/0., One of the authors (A.T.-Z.) would like to kindly acknowledge the Foundation of Polish Science for financial support.
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