Amjadi, Houman (1996):
Silicon-based inorganic electrets for application in micromachined devices.
In: IEEE Transactions on dielectrics and electrical insulation. 3 (1996), No. 4, S. 494-498, [Article]
| Item Type: | Article |
|---|---|
| Erschienen: | 1996 |
| Creators: | Amjadi, Houman |
| Title: | Silicon-based inorganic electrets for application in micromachined devices |
| Language: | English |
| Journal or Publication Title: | IEEE Transactions on dielectrics and electrical insulation. 3 (1996), No. 4, S. 494-498 |
| Divisions: | 18 Department of Electrical Engineering and Information Technology |
| Date Deposited: | 19 Nov 2008 16:00 |
| License: | [undefiniert] |
| Export: | |
| Suche nach Titel in: | TUfind oder in Google |
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