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Silicon-based inorganic electrets for application in micromachined devices

Amjadi, Houman (1996):
Silicon-based inorganic electrets for application in micromachined devices.
In: IEEE Transactions on dielectrics and electrical insulation. 3 (1996), No. 4, S. 494-498, [Article]

Item Type: Article
Erschienen: 1996
Creators: Amjadi, Houman
Title: Silicon-based inorganic electrets for application in micromachined devices
Language: English
Journal or Publication Title: IEEE Transactions on dielectrics and electrical insulation. 3 (1996), No. 4, S. 494-498
Divisions: 18 Department of Electrical Engineering and Information Technology
Date Deposited: 19 Nov 2008 16:00
License: [undefiniert]
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