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Fabrication and Application of Miniaturized Dielectric Elastomer Stack Actuators

Lotz, Peter and Matysek, Marc and Schlaak, Helmut F. (2011):
Fabrication and Application of Miniaturized Dielectric Elastomer Stack Actuators.
In: IEEE/ASME Transactions on Mechatronics, pp. 58-66, 16, (1), ISSN 1083-4435, [Online-Edition: http://dx.doi.org/10.1109/TMECH.2010.2090164],
[Article]

Abstract

In dielectric elastomer stack actuators (DEAs), the driving voltage is reduced using thin dielectric layers. They are efficiently fabricated in an automated process. To produce thin dielectric films, uncured polydimethylsiloxane (PDMS) is spun to a thickness below 100µm. After curing graphite, electrodes are sprayed on the PDMS surface and the next dielectric film can be applied on top. The main process steps are explained in detail. We show that the thickness variation within one layer is smaller than 4%. The electrodes are sprayed to have a sheet resistance of 10kOhm/sq. The technology presented here is able to produce DEAs with layer thicknesses down to 5µm. Hence, it is possible to design and fabricate actuators, which are driven only at 150V. Arrays of small actuators with a resolution of 1mm can be produced as well as single actuator elements with a diameter up to 40mm. Finally, the potential of this technology is demonstrated by two examples varying highly in their application. The first application is a vibrotactile display. It generates a perceptive vibration of 125Hz at a driving voltage of 600V. The second application is a peristaltic pump with a maximum flow rate of 12µl/min.

Item Type: Article
Erschienen: 2011
Creators: Lotz, Peter and Matysek, Marc and Schlaak, Helmut F.
Title: Fabrication and Application of Miniaturized Dielectric Elastomer Stack Actuators
Language: English
Abstract:

In dielectric elastomer stack actuators (DEAs), the driving voltage is reduced using thin dielectric layers. They are efficiently fabricated in an automated process. To produce thin dielectric films, uncured polydimethylsiloxane (PDMS) is spun to a thickness below 100µm. After curing graphite, electrodes are sprayed on the PDMS surface and the next dielectric film can be applied on top. The main process steps are explained in detail. We show that the thickness variation within one layer is smaller than 4%. The electrodes are sprayed to have a sheet resistance of 10kOhm/sq. The technology presented here is able to produce DEAs with layer thicknesses down to 5µm. Hence, it is possible to design and fabricate actuators, which are driven only at 150V. Arrays of small actuators with a resolution of 1mm can be produced as well as single actuator elements with a diameter up to 40mm. Finally, the potential of this technology is demonstrated by two examples varying highly in their application. The first application is a vibrotactile display. It generates a perceptive vibration of 125Hz at a driving voltage of 600V. The second application is a peristaltic pump with a maximum flow rate of 12µl/min.

Journal or Publication Title: IEEE/ASME Transactions on Mechatronics
Volume: 16
Number: 1
Divisions: 18 Department of Electrical Engineering and Information Technology > Institute for Electromechanical Design > Microtechnology and Electromechanical Systems
18 Department of Electrical Engineering and Information Technology > Institute for Electromechanical Design
18 Department of Electrical Engineering and Information Technology
Date Deposited: 25 Jan 2011 07:46
Official URL: http://dx.doi.org/10.1109/TMECH.2010.2090164
Identification Number: doi:10.1109/TMECH.2010.2090164
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