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Electrochemical deposition of Pd, Ti, and Ge for applications in GaAs technology

Schuessler, M. ; Statzner, ; Lin, ; Krozer, ; Horn, ; Hartnagel, Hans L. (1996):
Electrochemical deposition of Pd, Ti, and Ge for applications in GaAs technology.
In: Journal of the Electrochemical Society. 143 (1996), No. 4, S. 73-75, [Article]

Item Type: Article
Erschienen: 1996
Creators: Schuessler, M. ; Statzner, ; Lin, ; Krozer, ; Horn, ; Hartnagel, Hans L.
Title: Electrochemical deposition of Pd, Ti, and Ge for applications in GaAs technology
Language: English
Journal or Publication Title: Journal of the Electrochemical Society. 143 (1996), No. 4, S. 73-75
Divisions: 18 Department of Electrical Engineering and Information Technology
18 Department of Electrical Engineering and Information Technology > Microwave Electronics
Date Deposited: 19 Nov 2008 15:59
License: [undefiniert]
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