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Novel Silicon High Pressure Sensing Element.

Heinickel, Patrick and Werthschützky, Roland (2009):
Novel Silicon High Pressure Sensing Element.
In: Sensor+Test Conference 2009. Proceedings Sensor, Volume I., Nürnberg, In: Sensor+Test Conference 2009, Nürnberg, 26-28 May 2009, pp. 181-186, [Conference or Workshop Item]

Item Type: Conference or Workshop Item
Erschienen: 2009
Creators: Heinickel, Patrick and Werthschützky, Roland
Title: Novel Silicon High Pressure Sensing Element.
Language: English
Title of Book: Sensor+Test Conference 2009. Proceedings Sensor, Volume I.
Place of Publication: Nürnberg
Divisions: 18 Department of Electrical Engineering and Information Technology > Institute for Electromechanical Design > Measurement and Sensor Technology
18 Department of Electrical Engineering and Information Technology > Institute for Electromechanical Design
18 Department of Electrical Engineering and Information Technology
Event Title: Sensor+Test Conference 2009
Event Location: Nürnberg
Event Dates: 26-28 May 2009
Date Deposited: 27 Aug 2010 12:58
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