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Atomic force microscope based nanomanipulator for mechanical and optical lithography

Rubio-Sierra, F. J. and Burghardt, S. and Kempe, A. and Heckl, W. M. and Stark, R. W. (2004):
Atomic force microscope based nanomanipulator for mechanical and optical lithography.
In: Proc. 2004 4th IEEE Conf. Nanotechnology, Munich, Germany, 17.-19. Aug, [Conference or Workshop Item]

Item Type: Conference or Workshop Item
Erschienen: 2004
Creators: Rubio-Sierra, F. J. and Burghardt, S. and Kempe, A. and Heckl, W. M. and Stark, R. W.
Title: Atomic force microscope based nanomanipulator for mechanical and optical lithography
Language: English
Divisions: ?? fb99_csi~fg5 ??
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Event Title: Proc. 2004 4th IEEE Conf. Nanotechnology
Event Location: Munich, Germany
Event Dates: 17.-19. Aug
Date Deposited: 05 Jul 2010 12:54
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