Rubio-Sierra, F. J. and Burghardt, S. and Kempe, A. and Heckl, W. M. and Stark, R. W. (2004):
Atomic force microscope based nanomanipulator for mechanical and optical lithography.
In: Proc. 2004 4th IEEE Conf. Nanotechnology, Munich, Germany, 17.-19. Aug, [Conference or Workshop Item]
| Item Type: | Conference or Workshop Item |
|---|---|
| Erschienen: | 2004 |
| Creators: | Rubio-Sierra, F. J. and Burghardt, S. and Kempe, A. and Heckl, W. M. and Stark, R. W. |
| Title: | Atomic force microscope based nanomanipulator for mechanical and optical lithography |
| Language: | English |
| Divisions: | ?? fb99_csi~fg5 ?? UNSPECIFIED Zentrale Einrichtungen |
| Event Title: | Proc. 2004 4th IEEE Conf. Nanotechnology |
| Event Location: | Munich, Germany |
| Event Dates: | 17.-19. Aug |
| Date Deposited: | 05 Jul 2010 12:54 |
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