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Acoustical force nano-lithography of thin polymer films

Rubio-Sierra, F. J. and Yurtsever, A. and Hennemeyer, M. and Heckl, W. M. and Stark, R. W. (2006):
Acoustical force nano-lithography of thin polymer films.
In: Physica status solidi (a),, pp. pp. 1481-1486, vol. 2, [Article]

Item Type: Article
Erschienen: 2006
Creators: Rubio-Sierra, F. J. and Yurtsever, A. and Hennemeyer, M. and Heckl, W. M. and Stark, R. W.
Title: Acoustical force nano-lithography of thin polymer films
Language: English
Journal or Publication Title: Physica status solidi (a),
Volume: vol. 2
Divisions: ?? fb99_csi~fg5 ??
UNSPECIFIED
Zentrale Einrichtungen
Date Deposited: 08 Jun 2010 08:24
Identification Number: doi:10.1002/pssa.200566152
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