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Acoustical force nano-lithography of thin polymer films

Rubio-Sierra, F. J. and Yurtsever, A. and Hennemeyer, M. and Heckl, W. M. and Stark, R. W. (2006):
Acoustical force nano-lithography of thin polymer films.
In: Physica Status Solidi (A), 203 (6), pp. 1481-1486. Wiley-VCH, ISSN 1862-6300,
DOI: 10.1002/pssa.200566152,
[Article]

Item Type: Article
Erschienen: 2006
Creators: Rubio-Sierra, F. J. and Yurtsever, A. and Hennemeyer, M. and Heckl, W. M. and Stark, R. W.
Title: Acoustical force nano-lithography of thin polymer films
Language: English
Journal or Publication Title: Physica Status Solidi (A)
Journal volume: 203
Number: 6
Publisher: Wiley-VCH
Divisions: Zentrale Einrichtungen
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Date Deposited: 08 Jun 2010 08:24
DOI: 10.1002/pssa.200566152
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