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Visualizing stress in silicon microcantilevers using scanning confocal Raman spectroscopy

Bauer, M. and Gigler, A. M. and Richter, C. and Stark, R. W. :
Visualizing stress in silicon microcantilevers using scanning confocal Raman spectroscopy.
In: Microelectr. Eng., vol. 8 pp 1443-1446.
[Article] , (2008)

Item Type: Article
Erschienen: 2008
Creators: Bauer, M. and Gigler, A. M. and Richter, C. and Stark, R. W.
Title: Visualizing stress in silicon microcantilevers using scanning confocal Raman spectroscopy
Language: English
Journal or Publication Title: Microelectr. Eng.
Volume: vol. 8
Divisions: ?? fb99_csi~fg5 ??
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Date Deposited: 08 Jun 2010 06:58
Identification Number: doi:10.1016/j.mee.2008.01.089
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