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Visualizing stress in silicon microcantilevers using scanning confocal Raman spectroscopy

Bauer, M. and Gigler, A. M. and Richter, C. and Stark, R. W. (2008):
Visualizing stress in silicon microcantilevers using scanning confocal Raman spectroscopy.
In: Microelectronic Engineering, 85 (5-6), pp. 1443-1446. Elsevier, ISSN 0167-9317,
DOI: 10.1016/j.mee.2008.01.089,
[Article]

Item Type: Article
Erschienen: 2008
Creators: Bauer, M. and Gigler, A. M. and Richter, C. and Stark, R. W.
Title: Visualizing stress in silicon microcantilevers using scanning confocal Raman spectroscopy
Language: English
Journal or Publication Title: Microelectronic Engineering
Journal volume: 85
Number: 5-6
Publisher: Elsevier
Divisions: Zentrale Einrichtungen
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Date Deposited: 08 Jun 2010 06:58
DOI: 10.1016/j.mee.2008.01.089
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