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Evaluation of Nanoscale Roughness Measurements on a Plasma Treated SU-8 Polymer Surface by Atomic Force Microscopy

Walther, F. and Heckl, W. M. and Stark, R. W. (2008):
Evaluation of Nanoscale Roughness Measurements on a Plasma Treated SU-8 Polymer Surface by Atomic Force Microscopy.
In: Applied Surface Science, 254 (22), pp. 7290-7295. Elsevier, ISSN 01694332,
DOI: 10.1016/j.apsusc.2008.05.323,
[Article]

Item Type: Article
Erschienen: 2008
Creators: Walther, F. and Heckl, W. M. and Stark, R. W.
Title: Evaluation of Nanoscale Roughness Measurements on a Plasma Treated SU-8 Polymer Surface by Atomic Force Microscopy
Language: English
Journal or Publication Title: Applied Surface Science
Journal volume: 254
Number: 22
Publisher: Elsevier
Divisions: Zentrale Einrichtungen
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Date Deposited: 08 Jun 2010 07:00
DOI: 10.1016/j.apsusc.2008.05.323
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