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Ultralow-k dielectrics made by supercritical foaming of thin polymer films

Krause, B. and Koops, G. H. and van der Vegt, N. F. A. and Wessling, M. and Wübbenhorst, M. and van Turnhout, J. (2002):
Ultralow-k dielectrics made by supercritical foaming of thin polymer films.
In: Adv. Mater., p. 1041, (14), [Article]

Item Type: Article
Erschienen: 2002
Creators: Krause, B. and Koops, G. H. and van der Vegt, N. F. A. and Wessling, M. and Wübbenhorst, M. and van Turnhout, J.
Title: Ultralow-k dielectrics made by supercritical foaming of thin polymer films
Language: English
Journal or Publication Title: Adv. Mater.
Number: 14
Divisions: 07 Department of Chemistry
Zentrale Einrichtungen
07 Department of Chemistry > Computational Physical Chemistry
Date Deposited: 03 Mar 2010 10:02
Identification Number: doi:10.1023/A:1016317503435
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