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Functionality of a novel overload resistant silicon high pressure sensing element

Heinickel, Patrick and Werthschützky, Roland (2009):
Functionality of a novel overload resistant silicon high pressure sensing element.
In: IEEE Transducers 2009 Conference Proceeding, Denver, CO, USA, In: IEEE Transducers Conference 2009, Denver, CO, USA, June, 21th-25th, [Online-Edition: http://dx.doi.org/10.1109/SENSOR.2009.5285517],
[Conference or Workshop Item]

Item Type: Conference or Workshop Item
Erschienen: 2009
Creators: Heinickel, Patrick and Werthschützky, Roland
Title: Functionality of a novel overload resistant silicon high pressure sensing element
Language: English
Title of Book: IEEE Transducers 2009 Conference Proceeding
Place of Publication: Denver, CO, USA
Divisions: 18 Department of Electrical Engineering and Information Technology > Institute for Electromechanical Design > Measurement and Sensor Technology
18 Department of Electrical Engineering and Information Technology > Institute for Electromechanical Design
18 Department of Electrical Engineering and Information Technology
Event Title: IEEE Transducers Conference 2009
Event Location: Denver, CO, USA
Event Dates: June, 21th-25th
Date Deposited: 10 Nov 2009 13:57
Official URL: http://dx.doi.org/10.1109/SENSOR.2009.5285517
Identification Number: doi:10.1109/SENSOR.2009.5285517
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