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The scanning tunneling microscope as a tool for nanolithography: writing nanostructures on Si (110) in air

Urban, J. and Bräuer, and McKinnon, and Horn, and Hjort, and Pagnia, and Koops, and Hartnagel, (1995):
The scanning tunneling microscope as a tool for nanolithography: writing nanostructures on Si (110) in air.
In: Microelectronic engineering. 27 (1995), S. 113-116, [Article]

Item Type: Article
Erschienen: 1995
Creators: Urban, J. and Bräuer, and McKinnon, and Horn, and Hjort, and Pagnia, and Koops, and Hartnagel,
Title: The scanning tunneling microscope as a tool for nanolithography: writing nanostructures on Si (110) in air
Language: English
Journal or Publication Title: Microelectronic engineering. 27 (1995), S. 113-116
Divisions: 18 Department of Electrical Engineering and Information Technology
18 Department of Electrical Engineering and Information Technology > Microwave Electronics
Date Deposited: 19 Nov 2008 15:58
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