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Self-Aligned Fabrication Process Based on Sacrificial Catalyst for Pd-Contacted Carbon Nanotube Field-Effect Transistors

Rispal, Lorraine and Hang, H. and Heller, Rudolf and Hess, Gisela and Tzschöckel, Gerhard and Schwalke, Udo (2007):
Self-Aligned Fabrication Process Based on Sacrificial Catalyst for Pd-Contacted Carbon Nanotube Field-Effect Transistors.
In: ECS Transactions, pp. 53-61, 11, (8), [Online-Edition: http://dx.doi.org/10.1149/1.2783302],
[Article]

Item Type: Article
Erschienen: 2007
Creators: Rispal, Lorraine and Hang, H. and Heller, Rudolf and Hess, Gisela and Tzschöckel, Gerhard and Schwalke, Udo
Title: Self-Aligned Fabrication Process Based on Sacrificial Catalyst for Pd-Contacted Carbon Nanotube Field-Effect Transistors
Language: English
Journal or Publication Title: ECS Transactions
Volume: 11
Number: 8
Divisions: 18 Department of Electrical Engineering and Information Technology
18 Department of Electrical Engineering and Information Technology > Institute for Semiconductor Technology and Nano-Electronics
Event Title: 212th Meeting of The Electrochemical Society (ECS)
Event Location: Washington DC, USA
Event Dates: 07.-12.10.2007
Date Deposited: 20 Nov 2008 08:28
Official URL: http://dx.doi.org/10.1149/1.2783302
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