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Approaches to CMOS Integration of Epitaxial Gadolinium Oxide High-K Dielectrics

Gottlob, H. D. B. and Echtermeyer, T. and Mollenhauer, T. and Schmidt, M. and Efavi, J. and Wahlbrink, T. and Lemme, L. M. and Kurz, H. and Endres, Ralf and Stefanov, Yordan and Schwalke, Udo and Czernohorsky, M. and Bugiel, E. and Fissel, A. and Osten, H. J. (2006):
Approaches to CMOS Integration of Epitaxial Gadolinium Oxide High-K Dielectrics.
In: Proceedings of the 36th European Solid-State Device Research Conference (ESSDERC), pp. 150-153, [Online-Edition: http://dx.doi.org/10.1109/ESSDER.2006.307660],
[Article]

Item Type: Article
Erschienen: 2006
Creators: Gottlob, H. D. B. and Echtermeyer, T. and Mollenhauer, T. and Schmidt, M. and Efavi, J. and Wahlbrink, T. and Lemme, L. M. and Kurz, H. and Endres, Ralf and Stefanov, Yordan and Schwalke, Udo and Czernohorsky, M. and Bugiel, E. and Fissel, A. and Osten, H. J.
Title: Approaches to CMOS Integration of Epitaxial Gadolinium Oxide High-K Dielectrics
Language: English
Journal or Publication Title: Proceedings of the 36th European Solid-State Device Research Conference (ESSDERC)
Divisions: 18 Department of Electrical Engineering and Information Technology
18 Department of Electrical Engineering and Information Technology > Institute for Semiconductor Technology and Nano-Electronics
Event Title: 36th European Solid-State Device Research Conference (ESSDERC)
Event Location: Montreux, Schweiz
Event Dates: 19.-21.09.2006
Date Deposited: 20 Nov 2008 08:26
Official URL: http://dx.doi.org/10.1109/ESSDER.2006.307660
License: [undefiniert]
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