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Shallow Trench Isolation Chemical Mechanical Planarization

Stefanov, Yordan and Schwalke, Udo
Li, Yuzhuo (ed.) (2007):
Shallow Trench Isolation Chemical Mechanical Planarization.
In: Microelectronic Applications of Chemical Mechanical Planarization, Hoboken, NJ, USA, Wiley, [Book Section]

Item Type: Book Section
Erschienen: 2007
Editors: Li, Yuzhuo
Creators: Stefanov, Yordan and Schwalke, Udo
Title: Shallow Trench Isolation Chemical Mechanical Planarization
Language: English
Title of Book: Microelectronic Applications of Chemical Mechanical Planarization
Place of Publication: Hoboken, NJ, USA
Publisher: Wiley
ISBN: 978-0-471-71919-9
Divisions: 18 Department of Electrical Engineering and Information Technology
18 Department of Electrical Engineering and Information Technology > Institute for Semiconductor Technology and Nano-Electronics
Date Deposited: 20 Nov 2008 08:25
License: [undefiniert]
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