Stefanov, Yordan and Schwalke, Udo Li, Yuzhuo (ed.) (2007):
Shallow Trench Isolation Chemical Mechanical Planarization.
In: Microelectronic Applications of Chemical Mechanical Planarization, Hoboken, NJ, USA, Wiley, ISBN 978-0-471-71919-9,
[Book Section]
Item Type: | Book Section |
---|---|
Erschienen: | 2007 |
Editors: | Li, Yuzhuo |
Creators: | Stefanov, Yordan and Schwalke, Udo |
Title: | Shallow Trench Isolation Chemical Mechanical Planarization |
Language: | English |
Title of Book: | Microelectronic Applications of Chemical Mechanical Planarization |
Place of Publication: | Hoboken, NJ, USA |
Publisher: | Wiley |
ISBN: | 978-0-471-71919-9 |
Divisions: | 18 Department of Electrical Engineering and Information Technology 18 Department of Electrical Engineering and Information Technology > Institute for Semiconductor Technology and Nano-Electronics |
Date Deposited: | 20 Nov 2008 08:25 |
License: | [undefiniert] |
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Suche nach Titel in: | TUfind oder in Google |
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