Rispal, Lorraine and Schwalke, Udo (2005):
Carbon Nanotube Devices Integrated in the CMOS Process Using Chemical Vapour Deposition.
In: European Congress on Advanced Materials and Processes (EUROMAT), Prag, Tschechien, 05.-08.09.2005, [Conference or Workshop Item]
| Item Type: | Conference or Workshop Item |
|---|---|
| Erschienen: | 2005 |
| Creators: | Rispal, Lorraine and Schwalke, Udo |
| Title: | Carbon Nanotube Devices Integrated in the CMOS Process Using Chemical Vapour Deposition |
| Language: | English |
| Divisions: | 18 Department of Electrical Engineering and Information Technology 18 Department of Electrical Engineering and Information Technology > Institute for Semiconductor Technology and Nano-Electronics |
| Event Title: | European Congress on Advanced Materials and Processes (EUROMAT) |
| Event Location: | Prag, Tschechien |
| Event Dates: | 05.-08.09.2005 |
| Date Deposited: | 20 Nov 2008 08:23 |
| License: | [undefiniert] |
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