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Carbon Nanotube Devices Integrated in the CMOS Process Using Chemical Vapour Deposition

Rispal, Lorraine and Schwalke, Udo (2005):
Carbon Nanotube Devices Integrated in the CMOS Process Using Chemical Vapour Deposition.
In: European Congress on Advanced Materials and Processes (EUROMAT), Prag, Tschechien, 05.-08.09.2005, [Conference or Workshop Item]

Item Type: Conference or Workshop Item
Erschienen: 2005
Creators: Rispal, Lorraine and Schwalke, Udo
Title: Carbon Nanotube Devices Integrated in the CMOS Process Using Chemical Vapour Deposition
Language: English
Divisions: 18 Department of Electrical Engineering and Information Technology
18 Department of Electrical Engineering and Information Technology > Institute for Semiconductor Technology and Nano-Electronics
Event Title: European Congress on Advanced Materials and Processes (EUROMAT)
Event Location: Prag, Tschechien
Event Dates: 05.-08.09.2005
Date Deposited: 20 Nov 2008 08:23
License: [undefiniert]
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