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Linearity error of a high-accuracy electronic in combination with an integrated capacitive strain sensor for deflection measurements of a piezoelectric beam multilayer actuator

Ballas, R. G. and Schlaak, Helmut F. and Schmid, Andreas Joseph (2005):
Linearity error of a high-accuracy electronic in combination with an integrated capacitive strain sensor for deflection measurements of a piezoelectric beam multilayer actuator.
AMA Service Ges., In: SENSOR 2005 - 12th international conference, Nürnberg, Germany, 10 - 12 May 2005, pp. 67-72, [Conference or Workshop Item]

Item Type: Conference or Workshop Item
Erschienen: 2005
Creators: Ballas, R. G. and Schlaak, Helmut F. and Schmid, Andreas Joseph
Title: Linearity error of a high-accuracy electronic in combination with an integrated capacitive strain sensor for deflection measurements of a piezoelectric beam multilayer actuator
Language: English
Publisher: AMA Service Ges.
Divisions: 18 Department of Electrical Engineering and Information Technology
18 Department of Electrical Engineering and Information Technology > Institute for Electromechanical Design > Microtechnology and Electromechanical Systems
18 Department of Electrical Engineering and Information Technology > Institute for Electromechanical Design
Event Title: SENSOR 2005 - 12th international conference
Event Location: Nürnberg, Germany
Event Dates: 10 - 12 May 2005
Date Deposited: 20 Nov 2008 08:23
License: [undefiniert]
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