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Analytical formulations for the design of real diaphragms of silicon pressure transducers

Stavroulis, Stefanos and Werthschützky, Roland (2003):
Analytical formulations for the design of real diaphragms of silicon pressure transducers.
Winstorf/Germany, AMA Service, In: Internationale Messe mit Kongress Sensor <11, 2003, Nürnberg>: Proceedings Sensor 2003, 11th international conference, 13 - 15 May 2003, Exhibition Centre Nuremberg, Germany ; an event of the Association for Sensor Technology, AMA / [publ.: AMA Service G, [Conference or Workshop Item]

Item Type: Conference or Workshop Item
Erschienen: 2003
Creators: Stavroulis, Stefanos and Werthschützky, Roland
Title: Analytical formulations for the design of real diaphragms of silicon pressure transducers
Language: English
Series Name: Internationale Messe mit Kongress Sensor <11, 2003, Nürnberg>: Proceedings Sensor 2003, 11th international conference, 13 - 15 May 2003, Exhibition Centre Nuremberg, Germany ; an event of the Association for Sensor Technology, AMA / [publ.: AMA Service G
Place of Publication: Winstorf/Germany
Publisher: AMA Service
Divisions: 18 Department of Electrical Engineering and Information Technology
18 Department of Electrical Engineering and Information Technology > Institute for Electromechanical Design > Measurement and Sensor Technology
18 Department of Electrical Engineering and Information Technology > Institute for Electromechanical Design
Date Deposited: 20 Nov 2008 08:22
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