Stefanov, Yordan and Singh, Ravneet and DasGupta, Nandita and Misra, Pankaj and Schwalke, Udo (2005):
Conductive Atomic Force Microscopy Study of Leakage Currents Through Microscopic Structural Defects in High-K Gate Dielectrics.
In: Proceedings of The Electrochemical Society Conference "Crystalline Defects and Contamination" (ECS-DECON), [Article]
| Item Type: | Article |
|---|---|
| Erschienen: | 2005 |
| Creators: | Stefanov, Yordan and Singh, Ravneet and DasGupta, Nandita and Misra, Pankaj and Schwalke, Udo |
| Title: | Conductive Atomic Force Microscopy Study of Leakage Currents Through Microscopic Structural Defects in High-K Gate Dielectrics |
| Language: | English |
| Journal or Publication Title: | Proceedings of The Electrochemical Society Conference "Crystalline Defects and Contamination" (ECS-DECON) |
| Divisions: | 18 Department of Electrical Engineering and Information Technology 18 Department of Electrical Engineering and Information Technology > Institute for Semiconductor Technology and Nano-Electronics |
| Event Title: | The Electrochemical Society Conference "Crystalline Defects and Contamination" (ECS-DECON) |
| Event Location: | Grenoble, Frankreich |
| Date Deposited: | 20 Nov 2008 08:22 |
| License: | [undefiniert] |
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