Stefanov, Yordan and Singh, Ravneet and DasGupta, Nandita and Misra, Pankaj and Schwalke, Udo (2005):
Conductive Atomic Force Microscopy Study of Leakage Currents Through Microscopic Structural Defects in High-K Gate Dielectrics.
In: Proceedings of The Electrochemical Society Conference "Crystalline Defects and Contamination" (ECS-DECON), [Article]
Item Type: | Article |
---|---|
Erschienen: | 2005 |
Creators: | Stefanov, Yordan and Singh, Ravneet and DasGupta, Nandita and Misra, Pankaj and Schwalke, Udo |
Title: | Conductive Atomic Force Microscopy Study of Leakage Currents Through Microscopic Structural Defects in High-K Gate Dielectrics |
Language: | English |
Journal or Publication Title: | Proceedings of The Electrochemical Society Conference "Crystalline Defects and Contamination" (ECS-DECON) |
Divisions: | 18 Department of Electrical Engineering and Information Technology 18 Department of Electrical Engineering and Information Technology > Institute for Semiconductor Technology and Nano-Electronics |
Event Title: | The Electrochemical Society Conference "Crystalline Defects and Contamination" (ECS-DECON) |
Event Location: | Grenoble, Frankreich |
Date Deposited: | 20 Nov 2008 08:22 |
License: | [undefiniert] |
Export: | |
Suche nach Titel in: | TUfind oder in Google |
![]() |
Send an inquiry |
Options (only for editors)
![]() |
Show editorial Details |