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Ion permeability of amorphous hydrogen- and fluorine-containing carbon films formed by plasma enhanced chemical vapour deposition

Sittner, Falk and Ensinger, Wolfgang (2007):
Ion permeability of amorphous hydrogen- and fluorine-containing carbon films formed by plasma enhanced chemical vapour deposition.
In: Nuclear Instruments and Methods in Physxics Research Section B, 257 (1-2), pp. 737-740. Elsevier, [Article]

Abstract

Methane, tetra-fluoro-methane and mixtures of both gases were ionized by radiofrequency excitation at 13.56 MHz under reduced pressure. The ionic species from the plasma such as View the MathML source or View the MathML source were accelerated in an electrical field and deposited onto iron substrates, forming films of amorphous carbon with hydrogen and fluorine. Their sealing performance as protective coating on the iron substrates against aqueous corrosion was tested by electrochemical methods. Therefore, the ion permeability of the coating material was measured by means of the dissolution current of the substrate material. The influence of film thickness and plasma gas composition was evaluated.

Item Type: Article
Erschienen: 2007
Creators: Sittner, Falk and Ensinger, Wolfgang
Title: Ion permeability of amorphous hydrogen- and fluorine-containing carbon films formed by plasma enhanced chemical vapour deposition
Language: English
Abstract:

Methane, tetra-fluoro-methane and mixtures of both gases were ionized by radiofrequency excitation at 13.56 MHz under reduced pressure. The ionic species from the plasma such as View the MathML source or View the MathML source were accelerated in an electrical field and deposited onto iron substrates, forming films of amorphous carbon with hydrogen and fluorine. Their sealing performance as protective coating on the iron substrates against aqueous corrosion was tested by electrochemical methods. Therefore, the ion permeability of the coating material was measured by means of the dissolution current of the substrate material. The influence of film thickness and plasma gas composition was evaluated.

Journal or Publication Title: Nuclear Instruments and Methods in Physxics Research Section B
Journal volume: 257
Number: 1-2
Publisher: Elsevier
Uncontrolled Keywords: Thin films; Porosity; Electrochemistry; Corrosion
Divisions: 11 Department of Materials and Earth Sciences
11 Department of Materials and Earth Sciences > Material Science
11 Department of Materials and Earth Sciences > Material Science > Material Analytics
Date Deposited: 20 Nov 2008 08:21
Additional Information:

Ion Beam Modification of Materials — Proceedings of the 15th International Conference on Ion Beam Modification of Materials

15th International Conference on Ion Beam Modification of Materials

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