Sittner, Falk ; Ensinger, Wolfgang (2007)
Ion permeability of amorphous hydrogen- and fluorine-containing carbon films formed by plasma enhanced chemical vapour deposition.
In: Nuclear Instruments and Methods in Physxics Research Section B, 257 (1-2)
Artikel, Bibliographie
Kurzbeschreibung (Abstract)
Methane, tetra-fluoro-methane and mixtures of both gases were ionized by radiofrequency excitation at 13.56 MHz under reduced pressure. The ionic species from the plasma such as View the MathML source or View the MathML source were accelerated in an electrical field and deposited onto iron substrates, forming films of amorphous carbon with hydrogen and fluorine. Their sealing performance as protective coating on the iron substrates against aqueous corrosion was tested by electrochemical methods. Therefore, the ion permeability of the coating material was measured by means of the dissolution current of the substrate material. The influence of film thickness and plasma gas composition was evaluated.
| Typ des Eintrags: | Artikel |
|---|---|
| Erschienen: | 2007 |
| Autor(en): | Sittner, Falk ; Ensinger, Wolfgang |
| Art des Eintrags: | Bibliographie |
| Titel: | Ion permeability of amorphous hydrogen- and fluorine-containing carbon films formed by plasma enhanced chemical vapour deposition |
| Sprache: | Englisch |
| Publikationsjahr: | April 2007 |
| Verlag: | Elsevier |
| Titel der Zeitschrift, Zeitung oder Schriftenreihe: | Nuclear Instruments and Methods in Physxics Research Section B |
| Jahrgang/Volume einer Zeitschrift: | 257 |
| (Heft-)Nummer: | 1-2 |
| Kurzbeschreibung (Abstract): | Methane, tetra-fluoro-methane and mixtures of both gases were ionized by radiofrequency excitation at 13.56 MHz under reduced pressure. The ionic species from the plasma such as View the MathML source or View the MathML source were accelerated in an electrical field and deposited onto iron substrates, forming films of amorphous carbon with hydrogen and fluorine. Their sealing performance as protective coating on the iron substrates against aqueous corrosion was tested by electrochemical methods. Therefore, the ion permeability of the coating material was measured by means of the dissolution current of the substrate material. The influence of film thickness and plasma gas composition was evaluated. |
| Freie Schlagworte: | Thin films; Porosity; Electrochemistry; Corrosion |
| Zusätzliche Informationen: | Ion Beam Modification of Materials — Proceedings of the 15th International Conference on Ion Beam Modification of Materials 15th International Conference on Ion Beam Modification of Materials |
| Fachbereich(e)/-gebiet(e): | 11 Fachbereich Material- und Geowissenschaften 11 Fachbereich Material- und Geowissenschaften > Materialwissenschaft 11 Fachbereich Material- und Geowissenschaften > Materialwissenschaft > Fachgebiet Materialanalytik |
| Hinterlegungsdatum: | 20 Nov 2008 08:21 |
| Letzte Änderung: | 20 Feb 2020 13:23 |
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