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Electrical AFM Measurements for Evaluation of Nitride Erosion in Shallow Trench Isolation Chemical Mechanical Planarization

Stefanov, Yordan and Ruland, Tino and Schwalke, Udo (2004):
Electrical AFM Measurements for Evaluation of Nitride Erosion in Shallow Trench Isolation Chemical Mechanical Planarization.
In: Proceedings of the MRS Fall Meeting 2004, [Article]

Item Type: Article
Erschienen: 2004
Creators: Stefanov, Yordan and Ruland, Tino and Schwalke, Udo
Title: Electrical AFM Measurements for Evaluation of Nitride Erosion in Shallow Trench Isolation Chemical Mechanical Planarization
Language: English
Journal or Publication Title: Proceedings of the MRS Fall Meeting 2004
Divisions: 18 Department of Electrical Engineering and Information Technology
18 Department of Electrical Engineering and Information Technology > Institute for Semiconductor Technology and Nano-Electronics
Event Title: Symposium on Scanning Probe and Other Novel Microscopies of Local Phenomena in Nanostructured Materials
Event Location: Boston, MA, USA
Event Dates: 29.11.-03.12.2004
Date Deposited: 20 Nov 2008 08:20
License: [undefiniert]
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