Stefanov, Yordan and Komaragiri, Rama Subrahmanyam and Ruland, Tino and Schwalke, Udo (2004):
Electrical AFM Measurements for STI CMP Erosion Evaluation.
In: Nanoscale International Conference: Abstracts, p. 97, [Article]
| Item Type: | Article |
|---|---|
| Erschienen: | 2004 |
| Creators: | Stefanov, Yordan and Komaragiri, Rama Subrahmanyam and Ruland, Tino and Schwalke, Udo |
| Title: | Electrical AFM Measurements for STI CMP Erosion Evaluation |
| Language: | English |
| Journal or Publication Title: | Nanoscale International Conference: Abstracts |
| Divisions: | 18 Department of Electrical Engineering and Information Technology 18 Department of Electrical Engineering and Information Technology > Institute for Semiconductor Technology and Nano-Electronics |
| Event Title: | Nanoscale International Conference |
| Event Location: | Grenoble, Frankreich |
| Event Dates: | 13.-15.10.2004 |
| Date Deposited: | 20 Nov 2008 08:20 |
| License: | [undefiniert] |
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