Stefanov, Yordan and Komaragiri, Rama Subrahmanyam and Ruland, Tino and Schwalke, Udo (2004):
Electrical AFM Measurements for STI CMP Erosion Evaluation.
In: Nanoscale International Conference: Abstracts, p. 97. [Article]
Item Type: | Article |
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Erschienen: | 2004 |
Creators: | Stefanov, Yordan and Komaragiri, Rama Subrahmanyam and Ruland, Tino and Schwalke, Udo |
Title: | Electrical AFM Measurements for STI CMP Erosion Evaluation |
Language: | English |
Journal or Publication Title: | Nanoscale International Conference: Abstracts |
Divisions: | 18 Department of Electrical Engineering and Information Technology 18 Department of Electrical Engineering and Information Technology > Institute for Semiconductor Technology and Nano-Electronics |
Event Title: | Nanoscale International Conference |
Event Location: | Grenoble, Frankreich |
Event Dates: | 13.-15.10.2004 |
Date Deposited: | 20 Nov 2008 08:20 |
License: | [undefiniert] |
Export: | |
Suche nach Titel in: | TUfind oder in Google |
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