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Electrical AFM Measurements for STI CMP Erosion Evaluation

Stefanov, Yordan and Komaragiri, Rama Subrahmanyam and Ruland, Tino and Schwalke, Udo (2004):
Electrical AFM Measurements for STI CMP Erosion Evaluation.
In: Nanoscale International Conference: Abstracts, p. 97, [Article]

Item Type: Article
Erschienen: 2004
Creators: Stefanov, Yordan and Komaragiri, Rama Subrahmanyam and Ruland, Tino and Schwalke, Udo
Title: Electrical AFM Measurements for STI CMP Erosion Evaluation
Language: English
Journal or Publication Title: Nanoscale International Conference: Abstracts
Divisions: 18 Department of Electrical Engineering and Information Technology
18 Department of Electrical Engineering and Information Technology > Institute for Semiconductor Technology and Nano-Electronics
Event Title: Nanoscale International Conference
Event Location: Grenoble, Frankreich
Event Dates: 13.-15.10.2004
Date Deposited: 20 Nov 2008 08:20
License: [undefiniert]
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