Stefanov, Yordan and Cilek, F. and Endres, Ralf and Schwalke, Udo (2005):
Alternative Optimization Techniques for Shallow Trench Isolation and Replacement Gate Technology CMP.
In: The 2nd Pacific-Rim International Conference on Planarization CMP and Its Application Technology (PacRim-CMP), Seoul, Korea, 17.-19.11.2005, [Conference or Workshop Item]
| Item Type: | Conference or Workshop Item |
|---|---|
| Erschienen: | 2005 |
| Creators: | Stefanov, Yordan and Cilek, F. and Endres, Ralf and Schwalke, Udo |
| Title: | Alternative Optimization Techniques for Shallow Trench Isolation and Replacement Gate Technology CMP |
| Language: | English |
| Divisions: | 18 Department of Electrical Engineering and Information Technology 18 Department of Electrical Engineering and Information Technology > Institute for Semiconductor Technology and Nano-Electronics |
| Event Title: | The 2nd Pacific-Rim International Conference on Planarization CMP and Its Application Technology (PacRim-CMP) |
| Event Location: | Seoul, Korea |
| Event Dates: | 17.-19.11.2005 |
| Date Deposited: | 20 Nov 2008 08:19 |
| License: | [undefiniert] |
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