TU Darmstadt / ULB / TUbiblio

Alternative Optimization Techniques for Shallow Trench Isolation and Replacement Gate Technology CMP

Stefanov, Yordan and Cilek, F. and Endres, Ralf and Schwalke, Udo (2005):
Alternative Optimization Techniques for Shallow Trench Isolation and Replacement Gate Technology CMP.
In: The 2nd Pacific-Rim International Conference on Planarization CMP and Its Application Technology (PacRim-CMP), Seoul, Korea, 17.-19.11.2005, [Conference or Workshop Item]

Item Type: Conference or Workshop Item
Erschienen: 2005
Creators: Stefanov, Yordan and Cilek, F. and Endres, Ralf and Schwalke, Udo
Title: Alternative Optimization Techniques for Shallow Trench Isolation and Replacement Gate Technology CMP
Language: English
Divisions: 18 Department of Electrical Engineering and Information Technology
18 Department of Electrical Engineering and Information Technology > Institute for Semiconductor Technology and Nano-Electronics
Event Title: The 2nd Pacific-Rim International Conference on Planarization CMP and Its Application Technology (PacRim-CMP)
Event Location: Seoul, Korea
Event Dates: 17.-19.11.2005
Date Deposited: 20 Nov 2008 08:19
License: [undefiniert]
Export:

Optionen (nur für Redakteure)

View Item View Item