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Electrochemical micromachining of p-type silicon

Allongue, P. and Jiang, R. and Kirchner, V. and Trimmer, A. L. and Schuster, Rolf (2004):
Electrochemical micromachining of p-type silicon.
In: Journal of Physical Chemistry : B, pp. 14434-14439, 108, [Article]

Item Type: Article
Erschienen: 2004
Creators: Allongue, P. and Jiang, R. and Kirchner, V. and Trimmer, A. L. and Schuster, Rolf
Title: Electrochemical micromachining of p-type silicon
Language: English
Journal or Publication Title: Journal of Physical Chemistry : B
Volume: 108
Divisions: 07 Department of Chemistry
Date Deposited: 20 Nov 2008 08:19
License: [undefiniert]
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