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Design of optimised metal diaphragms for miniaturised media separated silicon pressure sensors

Wohlgemuth, C. and Werthschützky, Roland (2007):
Design of optimised metal diaphragms for miniaturised media separated silicon pressure sensors.
In: Sensor und Test 2007, International Conference <13, 2007, Nürnberg>, 2007, S. 247-252, [Conference or Workshop Item]

Item Type: Conference or Workshop Item
Erschienen: 2007
Creators: Wohlgemuth, C. and Werthschützky, Roland
Title: Design of optimised metal diaphragms for miniaturised media separated silicon pressure sensors
Language: English
Series Name: Sensor und Test 2007, International Conference <13, 2007, Nürnberg>, 2007, S. 247-252
Divisions: 18 Department of Electrical Engineering and Information Technology
18 Department of Electrical Engineering and Information Technology > Institute for Electromechanical Design > Measurement and Sensor Technology
18 Department of Electrical Engineering and Information Technology > Institute for Electromechanical Design
Date Deposited: 20 Nov 2008 08:18
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