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New piezoresistive silicon high pressure sensor

Stavroulis, Stefanos and Werthschützky, Roland (2000):
New piezoresistive silicon high pressure sensor.
Wien (u.a.), Springer, In: IMEKO 2000: IMEKO World Congress <16, 2000, Wien>: Proceedings. Vol. 3, S. 521-526. - Wien (u.a.): Springer, 2000, [Conference or Workshop Item]

Item Type: Conference or Workshop Item
Erschienen: 2000
Creators: Stavroulis, Stefanos and Werthschützky, Roland
Title: New piezoresistive silicon high pressure sensor
Language: German
Series Name: IMEKO 2000: IMEKO World Congress <16, 2000, Wien>: Proceedings. Vol. 3, S. 521-526. - Wien (u.a.): Springer, 2000
Place of Publication: Wien (u.a.)
Publisher: Springer
Divisions: 18 Department of Electrical Engineering and Information Technology
18 Department of Electrical Engineering and Information Technology > Institute for Electromechanical Design > Measurement and Sensor Technology
18 Department of Electrical Engineering and Information Technology > Institute for Electromechanical Design
Date Deposited: 20 Nov 2008 08:16
License: [undefiniert]
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