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III-V compound materials for MEMS including filters

Hartnagel, Hans L. and Mutamba, K. and Pfeiffer, J. (2000):
III-V compound materials for MEMS including filters.
In: International Electronics Devices and Materials Symposium <2000, Taiwan>: Proceedings, [Conference or Workshop Item]

Item Type: Conference or Workshop Item
Erschienen: 2000
Creators: Hartnagel, Hans L. and Mutamba, K. and Pfeiffer, J.
Title: III-V compound materials for MEMS including filters
Language: English
Series Name: International Electronics Devices and Materials Symposium <2000, Taiwan>: Proceedings
Divisions: 18 Department of Electrical Engineering and Information Technology
18 Department of Electrical Engineering and Information Technology > Microwave Electronics
Date Deposited: 19 Nov 2008 16:25
License: [undefiniert]
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