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Towards a fully integrated sub-THz microfluidic sensor platform for dielectric spectroscopy

Heine, Carl ; Durmaz, Emre Can ; Wang, Defu ; Cao, Zhibo ; Wietstruck, Matthias ; Tillack, Bernd ; Kissinger, Dietmar (2023)
Towards a fully integrated sub-THz microfluidic sensor platform for dielectric spectroscopy.
In: Frequenz, 2022, 76 (11-12)
doi: 10.26083/tuprints-00023214
Artikel, Zweitveröffentlichung, Verlagsversion

Kurzbeschreibung (Abstract)

Dielectric spectroscopy in the sub-THz regime is a promising candidate for microfluidic-based analysis of biological cells and bio-molecules, since multiple vibrational and rotational transition energy levels exist in this frequency range (P. Siegel, “Terahertz technology in biology and medicine,” IEEE Trans. Microw. Theor. Tech., vol. 52, pp. 2438–2447, 2004). This article presents our recent efforts in the implementation of microfluidic channel networks with silicon-based technologies to unleash the potential of an integrated sub-THz microfluidic sensor platform. Various aspects of dielectric sensors, readout systems, flowmeter design as well as implemention- and technology-related questions are addressed. Three dielectric sensor systems are presented operating at 240 GHz realizing transmission-based, reflection-based and full two-port architectures. Furthermore different silicon based microchannel integration techniques are discussed as well as a novel copper pillar-based PCB microchannel method is proposed and successfully demonstrated.

Typ des Eintrags: Artikel
Erschienen: 2023
Autor(en): Heine, Carl ; Durmaz, Emre Can ; Wang, Defu ; Cao, Zhibo ; Wietstruck, Matthias ; Tillack, Bernd ; Kissinger, Dietmar
Art des Eintrags: Zweitveröffentlichung
Titel: Towards a fully integrated sub-THz microfluidic sensor platform for dielectric spectroscopy
Sprache: Englisch
Publikationsjahr: 2023
Ort: Darmstadt
Publikationsdatum der Erstveröffentlichung: 2022
Verlag: De Gruyter
Titel der Zeitschrift, Zeitung oder Schriftenreihe: Frequenz
Jahrgang/Volume einer Zeitschrift: 76
(Heft-)Nummer: 11-12
DOI: 10.26083/tuprints-00023214
URL / URN: https://tuprints.ulb.tu-darmstadt.de/23214
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Herkunft: Zweitveröffentlichung
Kurzbeschreibung (Abstract):

Dielectric spectroscopy in the sub-THz regime is a promising candidate for microfluidic-based analysis of biological cells and bio-molecules, since multiple vibrational and rotational transition energy levels exist in this frequency range (P. Siegel, “Terahertz technology in biology and medicine,” IEEE Trans. Microw. Theor. Tech., vol. 52, pp. 2438–2447, 2004). This article presents our recent efforts in the implementation of microfluidic channel networks with silicon-based technologies to unleash the potential of an integrated sub-THz microfluidic sensor platform. Various aspects of dielectric sensors, readout systems, flowmeter design as well as implemention- and technology-related questions are addressed. Three dielectric sensor systems are presented operating at 240 GHz realizing transmission-based, reflection-based and full two-port architectures. Furthermore different silicon based microchannel integration techniques are discussed as well as a novel copper pillar-based PCB microchannel method is proposed and successfully demonstrated.

Freie Schlagworte: BiCMOS, dielectric spectroscopy, microfluidic, sensor platform, SiGe, subterahertz (sub-THz)
Status: Verlagsversion
URN: urn:nbn:de:tuda-tuprints-232140
Sachgruppe der Dewey Dezimalklassifikatin (DDC): 500 Naturwissenschaften und Mathematik > 530 Physik
500 Naturwissenschaften und Mathematik > 570 Biowissenschaften, Biologie
600 Technik, Medizin, angewandte Wissenschaften > 620 Ingenieurwissenschaften und Maschinenbau
Fachbereich(e)/-gebiet(e): 18 Fachbereich Elektrotechnik und Informationstechnik
18 Fachbereich Elektrotechnik und Informationstechnik > Institut für Mikrowellentechnik und Photonik (IMP)
Hinterlegungsdatum: 01 Mär 2023 10:02
Letzte Änderung: 06 Mär 2023 11:06
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