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Comparison of SIMS and e-beam SNMS depth profiling results using oxygen, cesium and argon as primary ions

Breuer, U. and Holzbrecher, and Gastel, and Becker, and Dietze, (1997):
Comparison of SIMS and e-beam SNMS depth profiling results using oxygen, cesium and argon as primary ions.
In: International Conference on Secondary Ion Mass Spectrometry <10, 1997>: Proceedings. Hrsg.: A. Benninghoven (u.a.) S. 391-394, Chicheter: Wiley, 1997, Chicheter, Wiley, [Conference or Workshop Item]

Item Type: Conference or Workshop Item
Erschienen: 1997
Creators: Breuer, U. and Holzbrecher, and Gastel, and Becker, and Dietze,
Title: Comparison of SIMS and e-beam SNMS depth profiling results using oxygen, cesium and argon as primary ions
Language: English
Series Name: International Conference on Secondary Ion Mass Spectrometry <10, 1997>: Proceedings. Hrsg.: A. Benninghoven (u.a.) S. 391-394
Place of Publication: Chicheter
Publisher: Wiley
Edition: Chicheter: Wiley, 1997
Divisions: 11 Department of Materials and Earth Sciences > Department of Earth Sciences (1999 merged into Department of Materials and Earth Sciences)
11 Department of Materials and Earth Sciences
Date Deposited: 19 Nov 2008 16:23
License: [undefiniert]
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