Ingar Romero, Alonso ; Mukherjee, Amlan kusum ; Fernandez Olvera, Anuar ; Méndez Aller, Mario ; Preu, Sascha (2022)
Visualizing nanometric structures with sub-millimeter waves.
In: Nature Communications, 12 (1)
doi: 10.26083/tuprints-00020430
Artikel, Zweitveröffentlichung, Verlagsversion
Kurzbeschreibung (Abstract)
The resolution along the propagation direction of far field imagers can be much smaller than the wavelength by exploiting coherent interference phenomena. We demonstrate a height profile precision as low as 31 nm using wavelengths between 0.375mm and 0.5mm (corresponding to 0.6 THz–0.8 THz) by evaluating the Fabry-Pérot oscillations within surfacestructured samples. We prove the extreme precision by visualizing structures with a height of only 49 nm, corresponding to 1:7500 to 1:10000 vacuum wavelengths, a height difference usually only accessible to near field measurement techniques at this wavelength range. At the same time, the approach can determine thicknesses in the centimeter range, surpassing the dynamic range of any near field measurement system by orders of magnitude. The measurement technique combined with a Hilbert-transform approach yields the (optical) thickness extracted from the relative phase without any extraordinary wavelength stabilization.
| Typ des Eintrags: | Artikel |
|---|---|
| Erschienen: | 2022 |
| Autor(en): | Ingar Romero, Alonso ; Mukherjee, Amlan kusum ; Fernandez Olvera, Anuar ; Méndez Aller, Mario ; Preu, Sascha |
| Art des Eintrags: | Zweitveröffentlichung |
| Titel: | Visualizing nanometric structures with sub-millimeter waves |
| Sprache: | Englisch |
| Publikationsjahr: | 2022 |
| Verlag: | Nature Publishing Group UK |
| Titel der Zeitschrift, Zeitung oder Schriftenreihe: | Nature Communications |
| Jahrgang/Volume einer Zeitschrift: | 12 |
| (Heft-)Nummer: | 1 |
| Kollation: | 7 Seiten |
| DOI: | 10.26083/tuprints-00020430 |
| URL / URN: | https://tuprints.ulb.tu-darmstadt.de/20430 |
| Zugehörige Links: | |
| Herkunft: | Zweitveröffentlichungsservice |
| Kurzbeschreibung (Abstract): | The resolution along the propagation direction of far field imagers can be much smaller than the wavelength by exploiting coherent interference phenomena. We demonstrate a height profile precision as low as 31 nm using wavelengths between 0.375mm and 0.5mm (corresponding to 0.6 THz–0.8 THz) by evaluating the Fabry-Pérot oscillations within surfacestructured samples. We prove the extreme precision by visualizing structures with a height of only 49 nm, corresponding to 1:7500 to 1:10000 vacuum wavelengths, a height difference usually only accessible to near field measurement techniques at this wavelength range. At the same time, the approach can determine thicknesses in the centimeter range, surpassing the dynamic range of any near field measurement system by orders of magnitude. The measurement technique combined with a Hilbert-transform approach yields the (optical) thickness extracted from the relative phase without any extraordinary wavelength stabilization. |
| Status: | Verlagsversion |
| URN: | urn:nbn:de:tuda-tuprints-204300 |
| Zusätzliche Informationen: | The raw data supporting this study have been deposited in the “TUdatalib” database and are available at https://doi.org/10.48328/tudatalib-664. All codes written for and used in this study are available from the corresponding authors upon request. |
| Sachgruppe der Dewey Dezimalklassifikatin (DDC): | 600 Technik, Medizin, angewandte Wissenschaften > 620 Ingenieurwissenschaften und Maschinenbau |
| Fachbereich(e)/-gebiet(e): | 18 Fachbereich Elektrotechnik und Informationstechnik 18 Fachbereich Elektrotechnik und Informationstechnik > Institut für Mikrowellentechnik und Photonik (IMP) |
| Hinterlegungsdatum: | 02 Feb 2022 13:41 |
| Letzte Änderung: | 03 Feb 2022 13:56 |
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