Ingar Romero, Alonso ; Mukherjee, Amlan kusum ; Fernandez Olvera, Anuar de Jesus ; Méndez Aller, Mario ; Preu, Sascha (2021)
Visualizing nanometric structures with sub-millimeter waves.
In: Nature Communications, 12
doi: 10.1038/s41467-021-27264-x
Artikel, Bibliographie
Kurzbeschreibung (Abstract)
The resolution along the propagation direction of far field imagers can be much smaller than the wavelength by exploiting coherent interference phenomena. We demonstrate a height profile precision as low as 31 nm using wavelengths between 0.375 mm and 0.5 mm (corresponding to 0.6 THz–0.8 THz) by evaluating the Fabry-P\'rot oscillations within surface-structured samples. We prove the extreme precision by visualizing structures with a height of only 49 nm, corresponding to 1:7500 to 1:10000 vacuum wavelengths, a height difference usually only accessible to near field measurement techniques at this wavelength range. At the same time, the approach can determine thicknesses in the centimeter range, surpassing the dynamic range of any near field measurement system by orders of magnitude. The measurement technique combined with a Hilbert-transform approach yields the (optical) thickness extracted from the relative phase without any extraordinary wavelength stabilization.
| Typ des Eintrags: | Artikel |
|---|---|
| Erschienen: | 2021 |
| Autor(en): | Ingar Romero, Alonso ; Mukherjee, Amlan kusum ; Fernandez Olvera, Anuar de Jesus ; Méndez Aller, Mario ; Preu, Sascha |
| Art des Eintrags: | Bibliographie |
| Titel: | Visualizing nanometric structures with sub-millimeter waves |
| Sprache: | Englisch |
| Publikationsjahr: | 7 Dezember 2021 |
| Verlag: | Springer |
| Titel der Zeitschrift, Zeitung oder Schriftenreihe: | Nature Communications |
| Jahrgang/Volume einer Zeitschrift: | 12 |
| DOI: | 10.1038/s41467-021-27264-x |
| Zugehörige Links: | |
| Kurzbeschreibung (Abstract): | The resolution along the propagation direction of far field imagers can be much smaller than the wavelength by exploiting coherent interference phenomena. We demonstrate a height profile precision as low as 31 nm using wavelengths between 0.375 mm and 0.5 mm (corresponding to 0.6 THz–0.8 THz) by evaluating the Fabry-P\'rot oscillations within surface-structured samples. We prove the extreme precision by visualizing structures with a height of only 49 nm, corresponding to 1:7500 to 1:10000 vacuum wavelengths, a height difference usually only accessible to near field measurement techniques at this wavelength range. At the same time, the approach can determine thicknesses in the centimeter range, surpassing the dynamic range of any near field measurement system by orders of magnitude. The measurement technique combined with a Hilbert-transform approach yields the (optical) thickness extracted from the relative phase without any extraordinary wavelength stabilization. |
| Zusätzliche Informationen: | Art.No.: 7091 |
| Fachbereich(e)/-gebiet(e): | 18 Fachbereich Elektrotechnik und Informationstechnik 18 Fachbereich Elektrotechnik und Informationstechnik > Institut für Mikrowellentechnik und Photonik (IMP) 18 Fachbereich Elektrotechnik und Informationstechnik > Institut für Mikrowellentechnik und Photonik (IMP) > THz Bauelemente und THz Systeme |
| TU-Projekte: | EC/H2020|713780|Pho-T-Lyze |
| Hinterlegungsdatum: | 10 Dez 2021 09:47 |
| Letzte Änderung: | 10 Dez 2021 09:47 |
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