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New results of micromachined silicon subminiature microphones using piezoelectric polymer layers

Kreßmann, Reiner and Heß, and Schellin, (1996):
New results of micromachined silicon subminiature microphones using piezoelectric polymer layers.
In: International Symposium on Electrets <9, 1996, Shanghai>: Proceedings. Hrsg.: X. Zhongfu (u.a.) S. 1044-1049, Piscataway, NJ: IEEE, 1996, Piscataway, NJ, IEEE, [Conference or Workshop Item]

Item Type: Conference or Workshop Item
Erschienen: 1996
Creators: Kreßmann, Reiner and Heß, and Schellin,
Title: New results of micromachined silicon subminiature microphones using piezoelectric polymer layers
Language: English
Series Name: International Symposium on Electrets <9, 1996, Shanghai>: Proceedings. Hrsg.: X. Zhongfu (u.a.) S. 1044-1049
Place of Publication: Piscataway, NJ
Publisher: IEEE
Edition: Piscataway, NJ: IEEE, 1996
Divisions: 18 Department of Electrical Engineering and Information Technology
Date Deposited: 19 Nov 2008 16:22
License: [undefiniert]
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