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Comparison of fundamental properties of r.f.-sputtered TiNx - and HfNx- coatings on steel substrates

Berg, Günter and Friedrich, C. and Broszeit, E. and Kloos, Karl Heinz (1995):
Comparison of fundamental properties of r.f.-sputtered TiNx - and HfNx- coatings on steel substrates.
In: Surface and coatings technology. 74/75 (1995), S. 135-142, [Article]

Item Type: Article
Erschienen: 1995
Creators: Berg, Günter and Friedrich, C. and Broszeit, E. and Kloos, Karl Heinz
Title: Comparison of fundamental properties of r.f.-sputtered TiNx - and HfNx- coatings on steel substrates
Language: English
Journal or Publication Title: Surface and coatings technology. 74/75 (1995), S. 135-142
Divisions: 16 Department of Mechanical Engineering
16 Department of Mechanical Engineering > Center for Engineering Materials, State Materials Testing Institute Darmstadt (MPA) Chair and Institute for Materials Technology (IfW)
Date Deposited: 19 Nov 2008 16:22
Additional Information:

Ersch. ebenf. in: Plasma surface engineering: Proceedings of the 4th Internat. Conf., 1994 Garmisch-Partenkirchen. Hrsg.: L. Stals (u.a.)

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