Walk, Dominik ; Kienemund, Daniel ; Agrawal, Prannoy ; Salg, Patrick ; Zeinar, Lukas ; Komissinskiy, Philipp ; Alff, Lambert ; Jakoby, Rolf ; Maune, Holger (2020)
Suppression of Acoustic Resonances in All-Oxide Varactors.
IEEE/MTT-S International Microwave Symposium (IMS 2020). virtual Conference (04.-06.08.2020)
doi: 10.1109/IMS30576.2020.9224035
Konferenzveröffentlichung, Bibliographie
Kurzbeschreibung (Abstract)
Barium strontium titanate (BST) thin-film varactors promise very good performance in RF frontends in terms of low loss and high tunability. However, their application is commonly limited to lower GHz frequencies. For higher frequencies, acoustic resonances drastically reduce the device quality in metal-insulator-metal (MIM) structures under bias voltage. In this work, this limitation is overcome by replacing the metal electrodes with conducting oxides that structurally match to BST and, therefore, avoid acoustic impedance mismatch. A detailed analytic model is derived, incorporating electric and acoustic behavior. Four samples with an oxide bottom electrode and varying BST thickness are characterized and fitted by the derived model with very high accuracy. Each shows a significantly reduced degradation due to acoustic loss. A model-wise comparison of stacks with metal and oxide electrodes demonstrates the strong benefit of all-oxide varactors, the possibility of complete suppression of acoustic resonances.
| Typ des Eintrags: | Konferenzveröffentlichung |
|---|---|
| Erschienen: | 2020 |
| Autor(en): | Walk, Dominik ; Kienemund, Daniel ; Agrawal, Prannoy ; Salg, Patrick ; Zeinar, Lukas ; Komissinskiy, Philipp ; Alff, Lambert ; Jakoby, Rolf ; Maune, Holger |
| Art des Eintrags: | Bibliographie |
| Titel: | Suppression of Acoustic Resonances in All-Oxide Varactors |
| Sprache: | Englisch |
| Publikationsjahr: | 14 Oktober 2020 |
| Verlag: | IEEE |
| Buchtitel: | Proceedings of the 2020 IEEE/MTT-S International Microwave Symposium (IMS) |
| Veranstaltungstitel: | IEEE/MTT-S International Microwave Symposium (IMS 2020) |
| Veranstaltungsort: | virtual Conference |
| Veranstaltungsdatum: | 04.-06.08.2020 |
| DOI: | 10.1109/IMS30576.2020.9224035 |
| Kurzbeschreibung (Abstract): | Barium strontium titanate (BST) thin-film varactors promise very good performance in RF frontends in terms of low loss and high tunability. However, their application is commonly limited to lower GHz frequencies. For higher frequencies, acoustic resonances drastically reduce the device quality in metal-insulator-metal (MIM) structures under bias voltage. In this work, this limitation is overcome by replacing the metal electrodes with conducting oxides that structurally match to BST and, therefore, avoid acoustic impedance mismatch. A detailed analytic model is derived, incorporating electric and acoustic behavior. Four samples with an oxide bottom electrode and varying BST thickness are characterized and fitted by the derived model with very high accuracy. Each shows a significantly reduced degradation due to acoustic loss. A model-wise comparison of stacks with metal and oxide electrodes demonstrates the strong benefit of all-oxide varactors, the possibility of complete suppression of acoustic resonances. |
| Freie Schlagworte: | acoustic resonance, BST, ferroelectric, modeling, suppression, thin-film varactors |
| Fachbereich(e)/-gebiet(e): | 11 Fachbereich Material- und Geowissenschaften 11 Fachbereich Material- und Geowissenschaften > Materialwissenschaft 11 Fachbereich Material- und Geowissenschaften > Materialwissenschaft > Fachgebiet Dünne Schichten 18 Fachbereich Elektrotechnik und Informationstechnik 18 Fachbereich Elektrotechnik und Informationstechnik > Institut für Mikrowellentechnik und Photonik (IMP) > Mikrowellentechnik 18 Fachbereich Elektrotechnik und Informationstechnik > Institut für Mikrowellentechnik und Photonik (IMP) |
| Hinterlegungsdatum: | 20 Nov 2020 09:04 |
| Letzte Änderung: | 11 Nov 2021 07:04 |
| PPN: | |
| Projekte: | This work was funded by the Deutsche Forschungsgemeinschaft (DFG) within Nos. KO 4093/1-1 and JA 921/31-1, as well as the Federal Ministry of Education and Research (BMBF) VIP+ Project No. 03VP0l150. |
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