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Surface Structuring of Diamond-Like Carbon Films by Chemical Etching of Zinc Inclusions

Hatada, Ruriko and Flege, Stefan and Rimmler, Berthold and Dietz, Christian and Ensinger, Wolfgang and Baba, Koumei (2019):
Surface Structuring of Diamond-Like Carbon Films by Chemical Etching of Zinc Inclusions.
In: Coatings, 9 (2), 2019. MDPI, p. 125, ISSN 2079-6412,
DOI: 10.3390/coatings9020125,
[Online-Edition: https://doi.org/10.3390/coatings9020125],
[Article]

Abstract

A diamond-like carbon (DLC) film with a nanostructured surface can be produced in a two-step process. At first, a metal-containing DLC film is deposited. Here, the combination of plasma source ion implantation using a hydrocarbon gas and magnetron sputtering of a zinc target was used. Next, the metal particles within the surface are dissolved by an etchant (HNO3:H2O solution in this case). Since Zn particles in the surface of Zn-DLC films have a diameter of 100–200 nm, the resulting surface structures possess the same dimensions, thus covering a range that is accessible neither by mask deposition techniques nor by etching of other metal-containing DLC films, such as Cu-DLC. The surface morphology of the etched Zn-DLC films depends on the initial metal content of the film. With a low zinc concentration of about 10 at.%, separate holes are produced within the surface. Higher zinc concentrations (40 at.% or above) lead to a surface with an intrinsic roughness.

Item Type: Article
Erschienen: 2019
Creators: Hatada, Ruriko and Flege, Stefan and Rimmler, Berthold and Dietz, Christian and Ensinger, Wolfgang and Baba, Koumei
Title: Surface Structuring of Diamond-Like Carbon Films by Chemical Etching of Zinc Inclusions
Language: English
Abstract:

A diamond-like carbon (DLC) film with a nanostructured surface can be produced in a two-step process. At first, a metal-containing DLC film is deposited. Here, the combination of plasma source ion implantation using a hydrocarbon gas and magnetron sputtering of a zinc target was used. Next, the metal particles within the surface are dissolved by an etchant (HNO3:H2O solution in this case). Since Zn particles in the surface of Zn-DLC films have a diameter of 100–200 nm, the resulting surface structures possess the same dimensions, thus covering a range that is accessible neither by mask deposition techniques nor by etching of other metal-containing DLC films, such as Cu-DLC. The surface morphology of the etched Zn-DLC films depends on the initial metal content of the film. With a low zinc concentration of about 10 at.%, separate holes are produced within the surface. Higher zinc concentrations (40 at.% or above) lead to a surface with an intrinsic roughness.

Journal or Publication Title: Coatings
Volume: 9
Number: 2
Publisher: MDPI
Uncontrolled Keywords: diamond-like carbon, surface morphology, deposition, metal, etching, dealloying, nanostructures
Divisions: 11 Department of Materials and Earth Sciences
11 Department of Materials and Earth Sciences > Material Science
11 Department of Materials and Earth Sciences > Material Science > Advanced Thin Film Technology
11 Department of Materials and Earth Sciences > Material Science > Material Analytics
11 Department of Materials and Earth Sciences > Material Science > Physics of Surfaces
Date Deposited: 14 Feb 2020 10:02
DOI: 10.3390/coatings9020125
Official URL: https://doi.org/10.3390/coatings9020125
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