Hatada, Ruriko and Flege, Stefan and Rimmler, Berthold and Dietz, Christian and Ensinger, Wolfgang and Baba, Koumei (2019):
Surface Structuring of Diamond-Like Carbon Films by Chemical Etching of Zinc Inclusions.
In: Coatings, 9 (2), 2019. MDPI, p. 125, ISSN 2079-6412,
DOI: 10.3390/coatings9020125,
[Online-Edition: https://doi.org/10.3390/coatings9020125],
[Article]
Abstract
A diamond-like carbon (DLC) film with a nanostructured surface can be produced in a two-step process. At first, a metal-containing DLC film is deposited. Here, the combination of plasma source ion implantation using a hydrocarbon gas and magnetron sputtering of a zinc target was used. Next, the metal particles within the surface are dissolved by an etchant (HNO3:H2O solution in this case). Since Zn particles in the surface of Zn-DLC films have a diameter of 100–200 nm, the resulting surface structures possess the same dimensions, thus covering a range that is accessible neither by mask deposition techniques nor by etching of other metal-containing DLC films, such as Cu-DLC. The surface morphology of the etched Zn-DLC films depends on the initial metal content of the film. With a low zinc concentration of about 10 at.%, separate holes are produced within the surface. Higher zinc concentrations (40 at.% or above) lead to a surface with an intrinsic roughness.
| Item Type: | Article |
|---|---|
| Erschienen: | 2019 |
| Creators: | Hatada, Ruriko and Flege, Stefan and Rimmler, Berthold and Dietz, Christian and Ensinger, Wolfgang and Baba, Koumei |
| Title: | Surface Structuring of Diamond-Like Carbon Films by Chemical Etching of Zinc Inclusions |
| Language: | English |
| Abstract: | A diamond-like carbon (DLC) film with a nanostructured surface can be produced in a two-step process. At first, a metal-containing DLC film is deposited. Here, the combination of plasma source ion implantation using a hydrocarbon gas and magnetron sputtering of a zinc target was used. Next, the metal particles within the surface are dissolved by an etchant (HNO3:H2O solution in this case). Since Zn particles in the surface of Zn-DLC films have a diameter of 100–200 nm, the resulting surface structures possess the same dimensions, thus covering a range that is accessible neither by mask deposition techniques nor by etching of other metal-containing DLC films, such as Cu-DLC. The surface morphology of the etched Zn-DLC films depends on the initial metal content of the film. With a low zinc concentration of about 10 at.%, separate holes are produced within the surface. Higher zinc concentrations (40 at.% or above) lead to a surface with an intrinsic roughness. |
| Journal or Publication Title: | Coatings |
| Volume: | 9 |
| Number: | 2 |
| Publisher: | MDPI |
| Uncontrolled Keywords: | diamond-like carbon, surface morphology, deposition, metal, etching, dealloying, nanostructures |
| Divisions: | 11 Department of Materials and Earth Sciences 11 Department of Materials and Earth Sciences > Material Science 11 Department of Materials and Earth Sciences > Material Science > Advanced Thin Film Technology 11 Department of Materials and Earth Sciences > Material Science > Material Analytics 11 Department of Materials and Earth Sciences > Material Science > Physics of Surfaces |
| Date Deposited: | 14 Feb 2020 10:02 |
| DOI: | 10.3390/coatings9020125 |
| Official URL: | https://doi.org/10.3390/coatings9020125 |
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