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Silicon-CMOS Compatible Transfer-Free Fabrication of Nanocrystalline Graphene Field-Effect Devices for Smart Gas-Sensor Applications

Schwalke, Udo and Noll, Dennis (2019):
Silicon-CMOS Compatible Transfer-Free Fabrication of Nanocrystalline Graphene Field-Effect Devices for Smart Gas-Sensor Applications.
Singapore, Singapore, In: Electron Devices Technology and Manufacturing Conference (EDTM), Singapore, Singapore, 12.-15.03.2019, DOI: 10.1109/EDTM.2019.8731320,
[Online-Edition: https://ieeexplore.ieee.org/abstract/document/8731320],
[Conference or Workshop Item]

Item Type: Conference or Workshop Item
Erschienen: 2019
Creators: Schwalke, Udo and Noll, Dennis
Title: Silicon-CMOS Compatible Transfer-Free Fabrication of Nanocrystalline Graphene Field-Effect Devices for Smart Gas-Sensor Applications
Language: English
Place of Publication: Singapore, Singapore
Divisions: 18 Department of Electrical Engineering and Information Technology
18 Department of Electrical Engineering and Information Technology > Institute for Semiconductor Technology and Nano-Electronics
Event Title: Electron Devices Technology and Manufacturing Conference (EDTM)
Event Location: Singapore, Singapore
Event Dates: 12.-15.03.2019
Date Deposited: 30 Jul 2019 09:55
DOI: 10.1109/EDTM.2019.8731320
Official URL: https://ieeexplore.ieee.org/abstract/document/8731320
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