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Devices with embedded channels

Burg, T. P. Brand, O. and Dufour, I. and Heinrich, S. and Josse, F. (eds.) (2015):
Devices with embedded channels.
In: Advanced Micro and Nanosystems, In: Resonant MEMS: fundamentals, implementation, and application, Weinheim, Germany, Wiley, pp. 261-286, [Online-Edition: https://books.google.de/books?id=8Fl\_BwAAQBAJ],
[Book Section]

Item Type: Book Section
Erschienen: 2015
Editors: Brand, O. and Dufour, I. and Heinrich, S. and Josse, F.
Creators: Burg, T. P.
Title: Devices with embedded channels
Language: English
Title of Book: Resonant MEMS: fundamentals, implementation, and application
Series Name: Advanced Micro and Nanosystems
Place of Publication: Weinheim, Germany
Publisher: Wiley
ISBN: 9783527335459
Divisions: 18 Department of Electrical Engineering and Information Technology
18 Department of Electrical Engineering and Information Technology > Integrated Micro- and Nanosystems
Date Deposited: 17 Jun 2019 08:19
Official URL: https://books.google.de/books?id=8Fl\_BwAAQBAJ
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