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Focused ion beam in situ lift-out of 2% Al-doped ZnO (AZO) thin films fabricated by pulsed laser deposition with a JEOL-JIB 4600F System

Molina-Luna, Leopoldo and Kunz, Ulrike and Duerrschnabel, Michael and Thybusch, Brunhilde and Saini, S. and Mele, P. and Kleebe, Hans-Joachim (2014):
Focused ion beam in situ lift-out of 2% Al-doped ZnO (AZO) thin films fabricated by pulsed laser deposition with a JEOL-JIB 4600F System.
Zürich, In: 9 th FIB Workshop 2014 D-A-CH Arbeitskreis FIB, ETH Zürich, 23. -24. Juni 2014, [Conference or Workshop Item]

Item Type: Conference or Workshop Item
Erschienen: 2014
Creators: Molina-Luna, Leopoldo and Kunz, Ulrike and Duerrschnabel, Michael and Thybusch, Brunhilde and Saini, S. and Mele, P. and Kleebe, Hans-Joachim
Title: Focused ion beam in situ lift-out of 2% Al-doped ZnO (AZO) thin films fabricated by pulsed laser deposition with a JEOL-JIB 4600F System
Language: English
Place of Publication: Zürich
Divisions: 11 Department of Materials and Earth Sciences
11 Department of Materials and Earth Sciences > Material Science
11 Department of Materials and Earth Sciences > Material Science > Advanced Electron Microscopy (aem)
11 Department of Materials and Earth Sciences > Material Science > Physical Metallurgy
Event Title: 9 th FIB Workshop 2014 D-A-CH Arbeitskreis FIB
Event Location: ETH Zürich
Event Dates: 23. -24. Juni 2014
Date Deposited: 10 Jan 2019 13:25
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