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MEMS-Based sample carriers for simultaneous heating and biasing experiments: a platform for in-situ TEM analysis

Perez-Garza, Hector H. and Pivak, Y. and Molina-Luna, Leopoldo and van Omme, J.T. and Spruit, Ronald G. and Sholkina, M. and Pen, M. and Xu, Q. (2017):
MEMS-Based sample carriers for simultaneous heating and biasing experiments: a platform for in-situ TEM analysis.
In: IEEE sensors letters Institute of Electrical and Electronics Engineers, IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC, 445 HOES LANE, PISCATAWAY, NJ 08855-4141 USA, In: 19th International Conference on Solid-State Sensors, Kaohsiung, Taiwan, 8-22 June 2017, pp. 18-22, DOI: 10.1109/TRANSDUCERS.2017.7994502,
[Conference or Workshop Item]

Abstract

We present the development of a MEMS-based sample carrier to be used for in-situ studies inside the Transmission Electron Microscope (TEM). This MEMS device, referred to as the Nano-Chip, acts as a multifunctional sample carrier and micro-sized laboratory for simultaneous heating and biasing experiments. Each Nano-Chip consists of eight contacts, which enable four-point-probe measurements for both heating and biasing purposes. The microheater enables temperatures up to 800°C. Similarly, the system allows to apply up to 100V, which can result in electric fields as high as 200kV/cm. Samples are placed directly onto the electron transparent windows which allow for the electron beam to pass through for in-situ imaging. This system represents a cost-effective add-on to the TEM, which acts as the ideal tool for failure analysis of semiconductor materials, characterization of batteries, fuel cells and studies of structure responses to electric fields.

Item Type: Conference or Workshop Item
Erschienen: 2017
Creators: Perez-Garza, Hector H. and Pivak, Y. and Molina-Luna, Leopoldo and van Omme, J.T. and Spruit, Ronald G. and Sholkina, M. and Pen, M. and Xu, Q.
Title: MEMS-Based sample carriers for simultaneous heating and biasing experiments: a platform for in-situ TEM analysis
Language: English
Abstract:

We present the development of a MEMS-based sample carrier to be used for in-situ studies inside the Transmission Electron Microscope (TEM). This MEMS device, referred to as the Nano-Chip, acts as a multifunctional sample carrier and micro-sized laboratory for simultaneous heating and biasing experiments. Each Nano-Chip consists of eight contacts, which enable four-point-probe measurements for both heating and biasing purposes. The microheater enables temperatures up to 800°C. Similarly, the system allows to apply up to 100V, which can result in electric fields as high as 200kV/cm. Samples are placed directly onto the electron transparent windows which allow for the electron beam to pass through for in-situ imaging. This system represents a cost-effective add-on to the TEM, which acts as the ideal tool for failure analysis of semiconductor materials, characterization of batteries, fuel cells and studies of structure responses to electric fields.

Journal or Publication Title: Transducers
Title of Book: IEEE sensors letters Institute of Electrical and Electronics Engineers
Publisher: IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC, 445 HOES LANE, PISCATAWAY, NJ 08855-4141 USA
Uncontrolled Keywords: MEMS, heating, biasing, in-situ, TEM
Divisions: 11 Department of Materials and Earth Sciences
11 Department of Materials and Earth Sciences > Material Science
11 Department of Materials and Earth Sciences > Material Science > Advanced Electron Microscopy (aem)
Event Title: 19th International Conference on Solid-State Sensors
Event Location: Kaohsiung, Taiwan
Event Dates: 8-22 June 2017
Date Deposited: 06 Dec 2018 10:17
DOI: 10.1109/TRANSDUCERS.2017.7994502
Identification Number: Electronic ISSN: 2167-0021
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