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TEM investigation of oxygen-engineered TiN/HfO2-based RRAM devices

Zintler, Alexander (2017):
TEM investigation of oxygen-engineered TiN/HfO2-based RRAM devices.
Darmstadt, TU Darmstadt, [Master Thesis]

Item Type: Master Thesis
Erschienen: 2017
Creators: Zintler, Alexander
Title: TEM investigation of oxygen-engineered TiN/HfO2-based RRAM devices
Language: English
Place of Publication: Darmstadt
Divisions: 11 Department of Materials and Earth Sciences
11 Department of Materials and Earth Sciences > Material Science
11 Department of Materials and Earth Sciences > Material Science > Advanced Electron Microscopy (aem)
Date Deposited: 06 Dec 2018 10:12
Referees: Molina Luna, Dr. Leopoldo and Kleebe, Prof. Dr. Hans-Joachim
Refereed / Verteidigung / mdl. Prüfung: 2017
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